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End Effector INC: Wafer Handling End Effectors

Pneumo Mechanical End-Effectors

Provide minimal contact, edge-gripping, side-gripping and non-contact wafer handling

The drive forces are created by vacuum, pressure, or electrical energy

Wafer Transport - Disk Substrate
Configuration: 2 inch ~ 200mm wafers

Product Description:
- Operates on 15 psi of vacuum, permitting operation in atmosphere or vacuum and can be employed without any system modifications, except mounting
- Retain the wafer being transported in case of any catastrophic system failure
- High holding forces that translate into faster operating speed
- Negates failures from inadequate vacuum supplies and small system leaks
- Supplied with photonic non-contact sensors to determine wafer presence and exact location
- Discharge static electric charges to prevent damage to the device being handled

Wafer Transport - Disk Substrate
Configuration: 100mm ~ 300mm wafers

Product Description:
- Operates on 30 to 60 psi of dry nitrogen which permits operation in both atmosphere and vacuum chambers
- Retain the wafer being transported in case of any catastrophic system failure
- High holding forces that translate into faster operating speed
- Negates failures from inadequate vacuum supplies and small system leaks
- Supplied with photonic non-contact sensors to determine wafer presence and exact location
- Discharge static electric charges to prevent damage to the device being handled

Wafer Transport - Disk Substrate

Product Description:
- First end effector that eliminate any top or bottom contact
- Pressure driven device which is compatible with all Talon accessories and pressure levels
- Positive side-gripping, self centering, high speed, no chuck cut-outs, fail-safe

Mask Transport - Rectangular Substrate

Product Description:
- It will not release the product being held should a system failure occur
- No front or backside contamination
- Compatible with any holder and adaptable to any robot with different custom sizes
- Produced in any configuration to accommodate product of varying sizes beyond the standards currently produced.

Wafer/Mask Transport - Round/Rectangular Substrate

Product Description:
- Requires 45 psi of clean dry nitrogen for operation and will hold wafers only when nitrogen flows
- Non-contact end-effector which can handle standard and thin wafers
- Ultimate in performance without front or backside contact and no breakage to fragile parts
- Fit with any standard holder and it is compatible with all robots

Mask Transport - Rectangular Substrate

Product Description:
- can handle masks of thickness up to 0.25 inches and a size of 13.0 inches square
- Side gripping - no top or bottom contact
- Clamping arms for this device are replaceable and interchangeable
- Clamping force can also be preset to optimize for the type of part being handled

Related Products:

  • Ceramic Vacuum Clamping End-Effectors

  • Weiss End-effector

  • SoftGrippping End-effector

© Automated Micron Assembly Pte Ltd (2015). All rights reserved.